Physical chemistry of the TiN/Hf0.5Zr0.5O2 interface

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • W. Hamouda - (Author)
  • A. Pancotti - (Author)
  • C. Lubin - (Author)
  • L. Tortech - (Author)
  • C. Richter - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • T. Mikolajick - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • U. Schroeder - (Author)
  • N. Barrett - (Author)

Details

Original languageEnglish
Article number064105
JournalJournal of applied physics
Volume127
Publication statusPublished - 14 Feb 2020
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 85079479392

Keywords

Library keywords