Photomask CD and LER characterization using Mueller matrix spectroscopic ellipsometry

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review

Contributors

Details

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2014
Peer-reviewedYes

External IDs

Scopus 84922938009

Keywords