On-Chip Slotted Patch Antenna at 226–244 GHz in SiGe Cu-Backend Technology

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Raqibul Hasan - , Leibniz Institute for High Performance Microelectronics (Author)
  • Darko Cvetkovski - , Leibniz Institute for High Performance Microelectronics (Author)
  • Franz Alwin Dürrwald - , Chair of Circuit Design and Network Theory (Author)
  • Seyyid Dilek - , Leibniz Institute for High Performance Microelectronics (Author)
  • Uwe Maaß - , Fraunhofer Institute for Reliability and Microintegration (Author)
  • Akanksha Bhutani - , Karlsruhe Institute of Technology (Author)
  • Mohamed Hussein Eissa - , Leibniz Institute for High Performance Microelectronics (Author)
  • Batuhan Sutbas - , Leibniz Institute for High Performance Microelectronics (Author)
  • Dietmar Kissinger - , Ulm University (Author)
  • Corrado Carta - , Leibniz Institute for High Performance Microelectronics, Technical University of Berlin (Author)

Abstract

This paper presents an on-chip patch antenna designed for 226-244 GHz frequency range. A 130-nm SiGe BiCMOS technology with Cu back-end-of-line process is used to fabricate this antenna. The antenna patch is realized with the thickest layer of aluminium on top-most metal layer of the technology. The lowest thin metal layer from the back-end-of-line acts as ground plane for the antenna, shielding the antenna from the thick bulk silicon of the IC technology, which would make the antenna less efficient. The thin substrate narrows the antenna bandwidth, but it provides moderate radiation efficiency. A proximity-coupled feed patch with a slot in it provides a measured bandwidth of 18 GHz, a broadside measured realized gain of 3 dBi, and a simulated radiation efficiency of 34.5 %.

Details

Original languageEnglish
Title of host publication2025 Asia-Pacific Microwave Conference (APMC)
Pages1-3
ISBN (electronic)979-8-3315-3455-4
Publication statusPublished - 5 Dec 2025
Peer-reviewedYes

Publication series

SeriesAsia-Pacific Conference on Microwave (APMC)
ISSN2690-3938

Conference

Title37th Asia-Pacific Microwave Conference
Abbreviated titleAPMC 2025
Conference number37
Duration2 - 5 December 2025
Website
LocationInternational Convention Center Jeju
CityJeju
CountryKorea, Republic of

External IDs

Scopus 105033961161

Keywords

ASJC Scopus subject areas

Keywords

  • BiCMOS, Cu-backend, SiGe, THz, mm-wave, on-chip antenna, proximity-coupled, slotted patch