On-Chip Slotted Patch Antenna at 226–244 GHz in SiGe Cu-Backend Technology
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
This paper presents an on-chip patch antenna designed for 226-244 GHz frequency range. A 130-nm SiGe BiCMOS technology with Cu back-end-of-line process is used to fabricate this antenna. The antenna patch is realized with the thickest layer of aluminium on top-most metal layer of the technology. The lowest thin metal layer from the back-end-of-line acts as ground plane for the antenna, shielding the antenna from the thick bulk silicon of the IC technology, which would make the antenna less efficient. The thin substrate narrows the antenna bandwidth, but it provides moderate radiation efficiency. A proximity-coupled feed patch with a slot in it provides a measured bandwidth of 18 GHz, a broadside measured realized gain of 3 dBi, and a simulated radiation efficiency of 34.5 %.
Details
| Original language | English |
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| Title of host publication | 2025 Asia-Pacific Microwave Conference (APMC) |
| Pages | 1-3 |
| ISBN (electronic) | 979-8-3315-3455-4 |
| Publication status | Published - 5 Dec 2025 |
| Peer-reviewed | Yes |
Publication series
| Series | Asia-Pacific Conference on Microwave (APMC) |
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| ISSN | 2690-3938 |
Conference
| Title | 37th Asia-Pacific Microwave Conference |
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| Abbreviated title | APMC 2025 |
| Conference number | 37 |
| Duration | 2 - 5 December 2025 |
| Website | |
| Location | International Convention Center Jeju |
| City | Jeju |
| Country | Korea, Republic of |
External IDs
| Scopus | 105033961161 |
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Keywords
ASJC Scopus subject areas
Keywords
- BiCMOS, Cu-backend, SiGe, THz, mm-wave, on-chip antenna, proximity-coupled, slotted patch