On-Chip Slotted Patch Antenna at 226–244 GHz in SiGe Cu-Backend Technology
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
This paper presents an on-chip patch antenna designed for 226-244 GHz frequency range. A 130-nm SiGe BiCMOS technology with Cu back-end-of-line process is used to fabricate this antenna. The antenna patch is realized with the thickest layer of aluminium on top-most metal layer of the technology. The lowest thin metal layer from the back-end-of-line acts as ground plane for the antenna, shielding the antenna from the thick bulk silicon of the IC technology, which would make the antenna less efficient. The thin substrate narrows the antenna bandwidth, but it provides moderate radiation efficiency. A proximity-coupled feed patch with a slot in it provides a measured bandwidth of 18 GHz, a broadside measured realized gain of 3 dBi, and a simulated radiation efficiency of 34.5 %.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2025 Asia-Pacific Microwave Conference (APMC) |
| Seiten | 1-3 |
| ISBN (elektronisch) | 979-8-3315-3455-4 |
| Publikationsstatus | Veröffentlicht - 5 Dez. 2025 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | Asia-Pacific Conference on Microwave (APMC) |
|---|---|
| ISSN | 2690-3938 |
Konferenz
| Titel | 37th Asia-Pacific Microwave Conference |
|---|---|
| Kurztitel | APMC 2025 |
| Veranstaltungsnummer | 37 |
| Dauer | 2 - 5 Dezember 2025 |
| Webseite | |
| Ort | International Convention Center Jeju |
| Stadt | Jeju |
| Land | Südkorea |
Externe IDs
| Scopus | 105033961161 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- BiCMOS, Cu-backend, SiGe, THz, mm-wave, on-chip antenna, proximity-coupled, slotted patch