On-chip lateral Si:Te PIN photodiodes for room-temperature detection in the telecom optical wavelength bands

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

Photonic integrated circuits require photodetectors that operate at room temperature with sensitivity at telecom wavelengths and are suitable for integration with planar complementarymetal- oxide-semiconductor (CMOS) technology. Silicon hyperdoped with deep-level impurities is a promising material for silicon infrared detectors because of its strong room-temperature photoresponse in the short-wavelength infrared region caused by the creation of an impurity band within the silicon band gap. In this work, we present the first experimental demonstration of lateral Te-hyperdoped Si PIN photodetectors operating at room temperature in the optical telecom bands. We provide a detailed description of the fabrication process, working principle, and performance of the photodiodes, including their key figure of merits. Our results are promising for the integration of active and passive photonic elements on a single Si chip, leveraging the advantages of planar CMOS technology.

Details

Original languageEnglish
Pages (from-to)26451-26462
Number of pages12
JournalOptics express
Volume31
Issue number16
Publication statusPublished - 31 Jul 2023
Peer-reviewedYes

External IDs

PubMed 37710506