We report the synthesis and characterization of novel diazosulfonate copolymers and terpolymers by free radical polymerization for the preparation of ultrathin films. Such films were covalently linked to silicon and glass substrates after a spin-coating and annealing process using 3-(trimethoxysilyl)propyl methacrylate as the adhesive comonomer. The polymers were characterized by NMR and IR spectroscopy and ellipsometry, and contact-angle measurements were used to analyze the film properties. The light-sensitive but thermally stable polymer films can be structured successfully by UV light down to the micrometer scale. The patterns written into the diazosulfonate film were produced by a UV laser without a mask. The photolysis in solution and in film was examined by UV spectroscopy.UV imaging: area selective representation of the UV transmission between 430 and 450 nm over a 60 x 60 mum(2) area of a spin coated film of copolymer 2. Pre-structuring with a He-Cd laser (at 325 nm) resulted in a ring-shaped structure of 30-mum diameter showing a higher transmissivity (brighter are) resulting from the reduced absorption of the polymer film (decomposition of the diazosulfonate functions).