Nanofabrication for Nanophotonics
Research output: Contribution to journal › Review article › Contributed › peer-review
Contributors
- Center for Advancing Electronics Dresden (cfaed)
- Chair of Physical Chemistry of Polymeric Materials
- Pohang University of Science and Technology
- National University of Singapore
- Singapore University of Technology and Design
- Ulsan National Institute of Science and Technology
- University of Stuttgart
- RIKEN Center for Advanced Photonics
- Tokushima University
- University of Illinois at Urbana-Champaign
- Ludwig Maximilian University of Munich
- Monash University
- Imperial College London
- Hanbat National University
- Seoul National University
- Korea University
- Sungkyunkwan University (SKKU)
- University of Central Florida
- Skolkovo Institute of Science and Technology
- Northwestern University
- Heidelberg University
- Gwangju Institute of Science and Technology
- Yonsei University
- Korea Advanced Institute of Science and Technology
- Institute of Materials Science of Barcelona (ICMAB-CSIC)
- Leibniz Institute of Polymer Research Dresden
Abstract
Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.
Details
| Original language | English |
|---|---|
| Pages (from-to) | 12491-12605 |
| Number of pages | 115 |
| Journal | ACS nano |
| Volume | 19 |
| Issue number | 13 |
| Publication status | Published - 8 Apr 2025 |
| Peer-reviewed | Yes |
External IDs
| PubMed | 40152322 |
|---|
Keywords
ASJC Scopus subject areas
Keywords
- Additive manufacturing, Bottom-up fabrication, High-resolution lithography, Metamaterials, Metaphotonics, Metasurfaces, Nanofabrication, Nanomanufacturing, Scalable manufacturing, Top-down fabrication