Nanofabrication for Nanophotonics

Research output: Contribution to journalReview articleContributedpeer-review

Contributors

  • Collaborators - (Author)
  • Center for Advancing Electronics Dresden (cfaed)
  • Chair of Physical Chemistry of Polymeric Materials
  • Pohang University of Science and Technology
  • Agency for Science, Technology and Research, Singapore
  • National University of Singapore
  • Singapore University of Technology and Design
  • Ulsan National Institute of Science and Technology
  • University of Stuttgart
  • RIKEN Center for Advanced Photonics
  • Tokushima University
  • University of Illinois at Urbana-Champaign
  • Ludwig Maximilian University of Munich
  • Monash University
  • Imperial College London
  • Hanbat National University
  • Seoul National University
  • Korea University
  • Sungkyunkwan University (SKKU)
  • University of Central Florida
  • Max Planck Institute for Solid State Research
  • Skolkovo Institute of Science and Technology
  • Northwestern University
  • Max Planck Institute for Medical Research
  • Heidelberg University 
  • Gwangju Institute of Science and Technology
  • Korea Basic Science Institute
  • Yonsei University
  • Korea Advanced Institute of Science and Technology
  • Institute of Materials Science of Barcelona (ICMAB-CSIC)
  • Leibniz Institute of Polymer Research Dresden

Abstract

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.

Details

Original languageEnglish
Pages (from-to)12491-12605
Number of pages115
JournalACS nano
Volume19
Issue number13
Publication statusPublished - 8 Apr 2025
Peer-reviewedYes

External IDs

PubMed 40152322

Keywords

Keywords

  • Additive manufacturing, Bottom-up fabrication, High-resolution lithography, Metamaterials, Metaphotonics, Metasurfaces, Nanofabrication, Nanomanufacturing, Scalable manufacturing, Top-down fabrication