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Multi-scale Investigations of 3D TSV Stacks using X-ray, electron and ion microscopy

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed

Contributors

Markus Löffler - , Dresden Center for Nanoanalysis (DCN) (Author)
Jürgen Gluch - , Chair of Materials Science and Nanotechnology (Author)
Ehrenfried Zschech - (Author)

Details

Original language	English
Title of host publication	MC2015
Publication status	Published - 2015
Peer-reviewed	No

Keywords