Monte Carlo simulation of charge carrier injection in twin flash™ memory devices during program and erase

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Contributors

  • R. Hagenbeck - , Qimonda Dresden GmbH and Co. OHG (Author)
  • S. Decker - , Infineon Technologies AG (Author)
  • P. Haibach - , Qimonda Dresden GmbH and Co. OHG (Author)
  • T. Mikolajick - , Qimonda Dresden GmbH and Co. OHG (Author)
  • G. Tempel - , Infineon Technologies AG (Author)
  • M. Isler - , Qimonda Dresden GmbH and Co. OHG (Author)
  • C. Jungemann - , Bundeswehr University of Munich (Author)
  • B. Meinerzhagen - , Technical University of Braunschweig (Author)

Abstract

An iterative and time-dependent simulation method based on a full band Monte Carlo algorithm is presented to describe the injection behavior of hot electrons and holes during program and erase of Twin Flash™ memory cells. Secondaries during programming and the feedback of already injected and trapped charge carriers in the ONO nitride on subsequent injection processes are taken into account. By this method it is possible to obtain valuable information on the time-dependent evolution and the local distribution of injection currents and trapped charges in the ONO nitride of the Twin Flash™ cell.

Details

Original languageEnglish
Title of host publication2006 International Conference on Simulation of Semiconductor Process and Devices, SISPAD '06
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages322-325
Number of pages4
ISBN (print)1424404045, 9781424404049
Publication statusPublished - 2006
Peer-reviewedYes
Externally publishedYes

Publication series

SeriesInternational Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Conference

Title2006 International Conference on Simulation of Semiconductor Process and Devices, SISPAD '06
Duration6 - 8 September 2006
CityMonterey, CA
CountryUnited States of America

External IDs

ORCID /0000-0003-3814-0378/work/155840914

Keywords

ASJC Scopus subject areas

Keywords

  • Erase, Hot carrier injection, Monte Carlo simulation, NROM, Program, Secondaries, Twin Flash memories