Modeling of CMOS Integrated Strain Sensors and Sensitivity Enhanced Readout Architecture
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Integrating sensors within a complete readout system on a single die has become essential to the More-than-Moore philosophy. Mechanical stress, as one of the physical quantities of potential interest, provides various information from simple static to dynamic load. Integration of piezoresistive elements within a complete CMOS system has been achieved in many ways, and ground-laying effects have been studied and described in detail. To bring the mechanical and electrical domains closer together, a new concept is presented that allows an analytical and simulation-based approximation of the sensors’ behavior due to applied mechanical stress as part of established concepts in electronics. It is evaluated based on measured state-of-the-art sensor implementations and used to bring up an alternative architecture with enhanced and on-the-fly adaptive sensitivity. Simulations are used to then further evaluate any model errors due to second-order effects that have been neglected within the design process.
Details
| Original language | English |
|---|---|
| Pages (from-to) | 583-594 |
| Number of pages | 12 |
| Journal | IEEE Transactions on Circuits and Systems I: Regular Papers |
| Volume | 71 |
| Issue number | 2 |
| Publication status | Published - 2023 |
| Peer-reviewed | Yes |
| Externally published | Yes |
External IDs
| Scopus | 85180314122 |
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Keywords
ASJC Scopus subject areas
Keywords
- Strain measurement, adjustable current mirror, integrated sensing, piezoresistivity, sensor model