Method for separating a solid-state layer from a solid-state material

Research output: Intellectual property › Patent application/Patent

Contributors

  • Ralf Rieske - , Infineon Technologies AG (Inventor)
  • Christian Beyer - (Inventor)
  • Christoph Guenther - (Inventor)
  • Jan Richter - (Inventor)
  • Marko David Swoboda - , Infineon Technologies AG (Inventor)
  • Siltectra GmbH

Abstract

A method for separating a solid-state layer from a solid-state material includes: moving the solid-state material relative to a laser processing system; successively emitting a plurality of laser beams from the laser processing system to the solid-state material to create modifications within the solid-state material; adjusting the laser processing system for defined focusing of the plurality of laser beams and/or for continuous adjustment of energy of the plurality of laser beams as a function of at least one parameter; and detaching the solid-state layer from the solid-state material in a region of the modifications.

Details

A method for separating a solid-state layer from a solid-state material includes: moving the solid-state material relative to a laser processing system; successively emitting a plurality of laser beams from the laser processing system to the solid-state material to create modifications within the solid-state material; adjusting the laser processing system for defined focusing of the plurality of laser beams and/or for continuous adjustment of energy of the plurality of laser beams as a function of at least one parameter; and detaching the solid-state layer from the solid-state material in a region of the modifications.

Original languageEnglish
IPC (International Patent Classification)B28D 5/ 00 A I
Patent numberUS2021299910
Filing date9 Jun 2021
Country/TerritoryUnited States of America
Priority date9 Jun 2021
Priority numberUS202117343219
Publication statusPublished - 30 Sept 2021
Externally publishedYes
No renderer: customAssociatesEventsRenderPortal,dk.atira.pure.api.shared.model.researchoutput.Patent

External IDs

ORCID /0000-0003-2572-1149/work/208796500