Mechanism of Retention Degradation after Endurance Cycling of HfO2-based Ferroelectric Transistors

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • H. Zhou - , Ferroelectric Memory GmbH (Author)
  • J. Ocker - , Ferroelectric Memory GmbH (Author)
  • M. Pesic - , Applied Materials Incorporated (Author)
  • A. Padovani - , Applied Materials Incorporated (Author)
  • M. Trentzsch - , Global Foundries, Inc. (Author)
  • S. Dünkel - , Global Foundries, Inc. (Author)
  • J. Müller - , Global Foundries, Inc. (Author)
  • S. Beyer - , Global Foundries, Inc. (Author)
  • L. Larcher - , Applied Materials Incorporated (Author)
  • F. Koushan - , Ferroelectric Memory GmbH (Author)
  • S. Müller - , Ferroelectric Memory GmbH (Author)
  • T. Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)

Abstract

In this study, we provide insight into the mechanism of retention degradation after endurance cycling of HfO2-based ferroelectric field-effect transistors (FeFETs). Transfer characteristics of the FeFET are compared with the current-voltage response of the ferroelectric capacitors (FeCAP) for better understanding of the retention loss mechanism after cycling. Furthermore, a multiscale simulation by using the Ginestra modeling platform is conducted and the results show that charge trapping stabilizes the polarization switching and improves the retention behavior. Retention after cycling experiments are shown as well as pathways to reduce this degradation mechanism.

Details

Original languageEnglish
Title of host publication2021 Symposium on VLSI Technology
Place of PublicationKyoto
PublisherIEEE Xplore
ISBN (electronic)978-1-6654-1945-1
ISBN (print)978-1-6654-3009-8
Publication statusPublished - 2021
Peer-reviewedYes

Publication series

SeriesSymposium on VLSI Technology
ISSN0743-1562

Conference

Title41st Symposium on VLSI Technology, VLSI Technology 2021
Duration13 - 19 June 2021
CityVirtual, Online
CountryJapan

External IDs

ORCID /0000-0003-3814-0378/work/142256371

Keywords