Material perspectives of HfO2-based ferroelectric films for device applications
Research output: Contribution to conferences › Paper › Contributed › peer-review
Contributors
Abstract
Ferroelectric HfO2 attracts a huge amount of attention not only for memory and negative capacitance, but also for programmable logic including memory-in-logic and neuromorphic applications. However, the understanding of material fundamentals still needs to be improved. This paper gives material fundamentals and new insights to this ferroelectric material for future device applications. In particular, the key role of dopants, effects of the interface on the ferroelectric phase, and a detailed discussion of the switching kinetics are of central focus. Based on material properties newly obtained, we discuss opportunities of ferroelectric HfO2 for device applications.
Details
| Original language | English |
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| Publication status | Published - Dec 2019 |
| Peer-reviewed | Yes |
Conference
| Title | 2019 Annual IEEE International Electron Devices Meeting |
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| Subtitle | Innovative Devices for an Era of Connected Intelligence |
| Abbreviated title | IEDM 2019 |
| Conference number | 65 |
| Duration | 7 - 11 December 2019 |
| Website | |
| City | San Francisco |
| Country | United States of America |
External IDs
| ORCID | /0000-0003-3814-0378/work/142256224 |
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