Machine Health diagnostics of Semiconductor Facility equipment

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review

Contributors

Original language	English
Title of host publication	Proceedings of 20th European Advanced Process Control and Manufacturing Conference (apc\|m)
Publication status	Published - 2022
Peer-reviewed	Yes

Title	20th European Advanced Process Control and Manufacturing Conference
Abbreviated title	apc\|m 2022
Conference number	20
Duration	4 - 6 April 2022
Website	https://www.apcm-europe.eu/home/ https://www.apcm-europe.eu/fileadmin/user_upload/Events/2022/apcm/Sponsorform-apcm_2022.pdf
Degree of recognition	International event
Location	Palais des Congrès Neptune
City	Toulon
Country	France

ORCID	/0000-0002-6824-3549/work/142236897