Laser Structured Silicon Based Multi Fourier Horn Resonator
Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review
Contributors
Abstract
This paper reports a Silicon (Si)-based, multiple
Fourier-horn ultrasonic nebulizer (MFHUN) which was
fabricated through femtosecond laser structuring of Si to reduce
sample preparation time and study the effectiveness of this
manufacturing process for Si-resonating structures. The system
showed better transfer characteristics than what is reported in
literature, giving the presented nebulizer the advantage of
higher power efficiency and lower individual sample
preparation costs.
Fourier-horn ultrasonic nebulizer (MFHUN) which was
fabricated through femtosecond laser structuring of Si to reduce
sample preparation time and study the effectiveness of this
manufacturing process for Si-resonating structures. The system
showed better transfer characteristics than what is reported in
literature, giving the presented nebulizer the advantage of
higher power efficiency and lower individual sample
preparation costs.
Details
| Original language | English |
|---|---|
| Title of host publication | 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) |
| ISBN (electronic) | 9798350341317 |
| Publication status | Published - 28 May 2023 |
| Peer-reviewed | Yes |
External IDs
| ORCID | /0000-0002-8588-9755/work/143959028 |
|---|---|
| Scopus | 85175267187 |
| Mendeley | 8276e7b9-eeb6-3df9-94d9-617c1391b6b4 |
Keywords
ASJC Scopus subject areas
Keywords
- Laser ablation, Si, structuring, piezoelectric transducer, Ultrasonic nebulizer, piezoelectric transducer, silicon laser structuring, ultrasonic nebulizer