This paper reports a Silicon (Si)-based, multiple
Fourier-horn ultrasonic nebulizer (MFHUN) which was
fabricated through femtosecond laser structuring of Si to reduce
sample preparation time and study the effectiveness of this
manufacturing process for Si-resonating structures. The system
showed better transfer characteristics than what is reported in
literature, giving the presented nebulizer the advantage of
higher power efficiency and lower individual sample
preparation costs.