Laser Structured Silicon Based Multi Fourier Horn Resonator
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
This paper reports a Silicon (Si)-based, multiple
Fourier-horn ultrasonic nebulizer (MFHUN) which was
fabricated through femtosecond laser structuring of Si to reduce
sample preparation time and study the effectiveness of this
manufacturing process for Si-resonating structures. The system
showed better transfer characteristics than what is reported in
literature, giving the presented nebulizer the advantage of
higher power efficiency and lower individual sample
preparation costs.
Fourier-horn ultrasonic nebulizer (MFHUN) which was
fabricated through femtosecond laser structuring of Si to reduce
sample preparation time and study the effectiveness of this
manufacturing process for Si-resonating structures. The system
showed better transfer characteristics than what is reported in
literature, giving the presented nebulizer the advantage of
higher power efficiency and lower individual sample
preparation costs.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) |
| ISBN (elektronisch) | 9798350341317 |
| Publikationsstatus | Veröffentlicht - 28 Mai 2023 |
| Peer-Review-Status | Ja |
Externe IDs
| ORCID | /0000-0002-8588-9755/work/143959028 |
|---|---|
| Scopus | 85175267187 |
| Mendeley | 8276e7b9-eeb6-3df9-94d9-617c1391b6b4 |
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Laser ablation, Si, structuring, piezoelectric transducer, Ultrasonic nebulizer, piezoelectric transducer, silicon laser structuring, ultrasonic nebulizer