Laser assisted SiC wafering using COLD SPLIT

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Marko Swoboda - , Siltectra GmbH (Author)
  • Christian Beyer - , Siltectra GmbH (Author)
  • Ralf Rieske - , Siltectra GmbH (Author)
  • Wolfram Drescher - , Siltectra GmbH (Author)
  • Jan Richter - , Siltectra GmbH (Author)

Abstract

Kerf-free wafering techniques hold the potential to drastically reduce material losses in semiconductor manufacturing processes. Spalling processes use externally applied stresses to separate crystalline materials along crystal planes with well-defined thickness. Spalled substrates, however, exhibit striations from crack propagation along the crystal, a pattern called Wallner lines. Here, we demonstrate a wafering process that scales favorably for SiC substrates starting from 1 inch in diameter. To eliminate the Wallner line pattern, we use a laser-conditioning process with high numerical aperture at photon energies below the material bandgap energy, using multi-photon effects. The process leads to SiC surfaces with a roughness after spalling of Ra< 4μm.

Details

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2016
EditorsKonstantinos Zekentes, Konstantinos Zekentes, Konstantin V. Vasilevskiy, Nikolaos Frangis
PublisherTrans Tech Publications Ltd
Pages403-406
Number of pages4
ISBN (electronic)978-3-0357-3043-2
ISBN (print)978-3-0357-1043-4
Publication statusPublished - 2017
Peer-reviewedYes
Externally publishedYes

Publication series

SeriesMaterials Science Forum
Volume897 MSF
ISSN0255-5476

Conference

Title11th European Conference on Silicon Carbide and Related Materials
Abbreviated titleECSCRM 2016
Conference number11
Duration25 - 29 September 2016
CityHalkidiki
CountryGreece

External IDs

ORCID /0000-0003-2572-1149/work/208796525

Keywords

Keywords

  • Kerf-less wafering, Multiphoton laser processes, Silicon carbide, Spalling