Laser assisted SiC wafering using COLD SPLIT
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Kerf-free wafering techniques hold the potential to drastically reduce material losses in semiconductor manufacturing processes. Spalling processes use externally applied stresses to separate crystalline materials along crystal planes with well-defined thickness. Spalled substrates, however, exhibit striations from crack propagation along the crystal, a pattern called Wallner lines. Here, we demonstrate a wafering process that scales favorably for SiC substrates starting from 1 inch in diameter. To eliminate the Wallner line pattern, we use a laser-conditioning process with high numerical aperture at photon energies below the material bandgap energy, using multi-photon effects. The process leads to SiC surfaces with a roughness after spalling of Ra< 4μm.
Details
| Original language | English |
|---|---|
| Title of host publication | Silicon Carbide and Related Materials 2016 |
| Editors | Konstantinos Zekentes, Konstantinos Zekentes, Konstantin V. Vasilevskiy, Nikolaos Frangis |
| Publisher | Trans Tech Publications Ltd |
| Pages | 403-406 |
| Number of pages | 4 |
| ISBN (electronic) | 978-3-0357-3043-2 |
| ISBN (print) | 978-3-0357-1043-4 |
| Publication status | Published - 2017 |
| Peer-reviewed | Yes |
| Externally published | Yes |
Publication series
| Series | Materials Science Forum |
|---|---|
| Volume | 897 MSF |
| ISSN | 0255-5476 |
Conference
| Title | 11th European Conference on Silicon Carbide and Related Materials |
|---|---|
| Abbreviated title | ECSCRM 2016 |
| Conference number | 11 |
| Duration | 25 - 29 September 2016 |
| City | Halkidiki |
| Country | Greece |
External IDs
| ORCID | /0000-0003-2572-1149/work/208796525 |
|---|
Keywords
ASJC Scopus subject areas
Keywords
- Kerf-less wafering, Multiphoton laser processes, Silicon carbide, Spalling