Laser assisted SiC wafering using COLD SPLIT
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Kerf-free wafering techniques hold the potential to drastically reduce material losses in semiconductor manufacturing processes. Spalling processes use externally applied stresses to separate crystalline materials along crystal planes with well-defined thickness. Spalled substrates, however, exhibit striations from crack propagation along the crystal, a pattern called Wallner lines. Here, we demonstrate a wafering process that scales favorably for SiC substrates starting from 1 inch in diameter. To eliminate the Wallner line pattern, we use a laser-conditioning process with high numerical aperture at photon energies below the material bandgap energy, using multi-photon effects. The process leads to SiC surfaces with a roughness after spalling of Ra< 4μm.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | Silicon Carbide and Related Materials 2016 |
| Redakteure/-innen | Konstantinos Zekentes, Konstantinos Zekentes, Konstantin V. Vasilevskiy, Nikolaos Frangis |
| Herausgeber (Verlag) | Trans Tech Publications Ltd |
| Seiten | 403-406 |
| Seitenumfang | 4 |
| ISBN (elektronisch) | 978-3-0357-3043-2 |
| ISBN (Print) | 978-3-0357-1043-4 |
| Publikationsstatus | Veröffentlicht - 2017 |
| Peer-Review-Status | Ja |
| Extern publiziert | Ja |
Publikationsreihe
| Reihe | Materials Science Forum |
|---|---|
| Band | 897 MSF |
| ISSN | 0255-5476 |
Konferenz
| Titel | 11th European Conference on Silicon Carbide and Related Materials |
|---|---|
| Kurztitel | ECSCRM 2016 |
| Veranstaltungsnummer | 11 |
| Dauer | 25 - 29 September 2016 |
| Stadt | Halkidiki |
| Land | Griechenland |
Externe IDs
| ORCID | /0000-0003-2572-1149/work/208796525 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Kerf-less wafering, Multiphoton laser processes, Silicon carbide, Spalling