Laser assisted SiC wafering using COLD SPLIT

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Marko Swoboda - , Siltectra GmbH (Autor:in)
  • Christian Beyer - , Siltectra GmbH (Autor:in)
  • Ralf Rieske - , Siltectra GmbH (Autor:in)
  • Wolfram Drescher - , Siltectra GmbH (Autor:in)
  • Jan Richter - , Siltectra GmbH (Autor:in)

Abstract

Kerf-free wafering techniques hold the potential to drastically reduce material losses in semiconductor manufacturing processes. Spalling processes use externally applied stresses to separate crystalline materials along crystal planes with well-defined thickness. Spalled substrates, however, exhibit striations from crack propagation along the crystal, a pattern called Wallner lines. Here, we demonstrate a wafering process that scales favorably for SiC substrates starting from 1 inch in diameter. To eliminate the Wallner line pattern, we use a laser-conditioning process with high numerical aperture at photon energies below the material bandgap energy, using multi-photon effects. The process leads to SiC surfaces with a roughness after spalling of Ra< 4μm.

Details

OriginalspracheEnglisch
TitelSilicon Carbide and Related Materials 2016
Redakteure/-innenKonstantinos Zekentes, Konstantinos Zekentes, Konstantin V. Vasilevskiy, Nikolaos Frangis
Herausgeber (Verlag)Trans Tech Publications Ltd
Seiten403-406
Seitenumfang4
ISBN (elektronisch)978-3-0357-3043-2
ISBN (Print)978-3-0357-1043-4
PublikationsstatusVeröffentlicht - 2017
Peer-Review-StatusJa
Extern publiziertJa

Publikationsreihe

ReiheMaterials Science Forum
Band897 MSF
ISSN0255-5476

Konferenz

Titel11th European Conference on Silicon Carbide and Related Materials
KurztitelECSCRM 2016
Veranstaltungsnummer11
Dauer25 - 29 September 2016
StadtHalkidiki
LandGriechenland

Externe IDs

ORCID /0000-0003-2572-1149/work/208796525

Schlagworte

Schlagwörter

  • Kerf-less wafering, Multiphoton laser processes, Silicon carbide, Spalling