Large area direct fabrication of periodic arrays using interference patterning

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Andrés F. Lasagni - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Teja Roch - , Chair of Laser and Surface Technology (Author)
  • Denise Langheinrich - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Matthias Bieda - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Andreas Wetzig - , Fraunhofer Institute for Material and Beam Technology (Author)

Abstract

In this study, we introduce a recently developed approach for the fabrication of two and three dimensional structures using Direct Laser Interference Patterning (DLIP). Different periodic arrays were fabricated on polymers, resists and carbon like layers using a nanosecond pulsed laser system. The fabricated structures range from the submicrometer (~180 nm) to micrometer (~10 μm) range, and its resolution (minimal achievable feature size) depends basically on interaction nature of the laser light with the processed material, as well as the utilized wavelength and laser processing parameters. Different examples of fabricated arrays and their applications are discussed.

Details

Original languageEnglish
Pages (from-to)214-220
Number of pages7
JournalPhysics Procedia
Volume12
Issue numberPART 2
Publication statusPublished - 2011
Peer-reviewedYes

External IDs

ORCID /0000-0003-4333-4636/work/219265547

Keywords

ASJC Scopus subject areas

Keywords

  • Ceramics, Direct Laser Interference Patterning, Metals, Micro and submicrometer fabrication, Polymers