Large area direct fabrication of periodic arrays using interference patterning
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
In this study, we introduce a recently developed approach for the fabrication of two and three dimensional structures using Direct Laser Interference Patterning (DLIP). Different periodic arrays were fabricated on polymers, resists and carbon like layers using a nanosecond pulsed laser system. The fabricated structures range from the submicrometer (~180 nm) to micrometer (~10 μm) range, and its resolution (minimal achievable feature size) depends basically on interaction nature of the laser light with the processed material, as well as the utilized wavelength and laser processing parameters. Different examples of fabricated arrays and their applications are discussed.
Details
| Original language | English |
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| Pages (from-to) | 214-220 |
| Number of pages | 7 |
| Journal | Physics Procedia |
| Volume | 12 |
| Issue number | PART 2 |
| Publication status | Published - 2011 |
| Peer-reviewed | Yes |
External IDs
| ORCID | /0000-0003-4333-4636/work/219265547 |
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Keywords
ASJC Scopus subject areas
Keywords
- Ceramics, Direct Laser Interference Patterning, Metals, Micro and submicrometer fabrication, Polymers