Influence of well profile and gate length on the ESD performance of a fully silicided 0.25 μm CMOS technology
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Contributors
Abstract
On electrostatic discharge (ESD) evaluation of a silicided 0.25 μm complementary metal-oxide-semiconductor (CMOS) technology is carried out by HBM, CDM, and TLP tests. Good ESD hardness and device performance are obtained by using retrograde-like well profiles. It is shown that devices with minimum gate length do not necessarily give the best ESD-results. This is due to a difference in failure mechanism between the shortest and the longer channel devices and possibly by a more homogeneous snapback of the slightly longer devices.
Details
Original language | English |
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Pages (from-to) | 286-294 |
Number of pages | 9 |
Journal | Electrical Overstress Electrostatic Discharge Symposium proceedings |
Volume | 21 |
Issue number | 4 |
Publication status | Published - 1998 |
Peer-reviewed | Yes |
Externally published | Yes |
External IDs
ORCID | /0000-0002-0757-3325/work/139064818 |
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