Influence of sputtering pressure on microstructure and layer properties of iridium thin films

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • A. Buettner - (Author)
  • A. -C. Probst - (Author)
  • F. Emmerich - (Author)
  • C. Damm - (Author)
  • B. Rellinghaus - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • T. Doehring - (Author)
  • M. Stollenwerk - (Author)

Details

Original languageUndefined
Pages (from-to)41-46
Number of pages6
JournalThin solid films
Volume662
Publication statusPublished - 30 Sept 2018
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 85050558180

Keywords