Improved Thinning of GaAs Substrates by Wet Chemical Etching

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • K. Bock - , Technische Universität Darmstadt (Author)
  • A. Grüb - , Technische Universität Darmstadt (Author)
  • H. L. Hartnagel - , Technische Universität Darmstadt (Author)

Details

Original languageEnglish
Pages (from-to)3301-3302
Number of pages2
JournalJournal of the Electrochemical Society
Volume137
Issue number10
Publication statusPublished - Oct 1990
Peer-reviewedYes
Externally publishedYes

External IDs

ORCID /0000-0002-0757-3325/work/139064998

Keywords

Sustainable Development Goals

ASJC Scopus subject areas

Library keywords