Impact of the Ferroelectric and Interface Layer Optimization in an MFIS HZO based Ferroelectric Tunnel Junction for Neuromorphic based Synaptic Storage

Research output: Contribution to journalConference articleContributedpeer-review

Contributors

  • Tarek Ali - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Ayse Sünbül - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Konstantin Mertens - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Ricardo Revello - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Maximilian Lederer - , Chair of Experimental Physics / Photophysics, Fraunhofer Institute for Photonic Microsystems (Author)
  • David Lehninger - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Franz Müller - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Kati Kühnel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Mattinas Rudolph - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Sebastien Oehler - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Raik Hoffinann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Katrin Zimmermann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Kati Biedermann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Philipp Schramm - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Malte Czernohorsky - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Kämpfe - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Lukas M. Eng - , Chair of Experimental Physics / Photophysics, TUD Dresden University of Technology (Author)

Abstract

The stack structure tuning of the ferroelectric tunnel junction (FTJ) devices is reported based on the ferroelectric (FE) layer thickness and interface layer (IL) type/thickness optimization to maximize the FTJ Ion/Ioffratio. A FE thickness scaling shows a low voltage FTJ operation, further challenged by a diminishing trend in the maximum Ion/Ioffratio due to the thickness dependence of the FE polarization, independent of the IL thickness. The maximum Ion/Ioffratio varies by tuning the IL type (SiO2, Al2O3) and thickness (1 nm, 2 nm), indicating a maximum at the SiO2(1 nm) IL condition. A stable endurance of 104cycles is limited by the high field/cycles induced IL degradation, a stable FTJ at 10y extrapolated retention time is shown. The FTJ synaptic device operation is reported with insight on the stack structure tunmg impact on the synaptic LTP/LTD nonlmeanty and maximum dynamic range.

Details

Original languageEnglish
Pages (from-to)1
Journal2021 Silicon Nanoelectronics Workshop, SNW 2021
Publication statusPublished - 2021
Peer-reviewedYes

Conference

Title26th Silicon Nanoelectronics Workshop, SNW 2021
Duration13 June 2021
CityVirtual, Online
CountryJapan

External IDs

ORCID /0000-0002-2484-4158/work/142257568