Impact of the Ferroelectric and Interface Layer Optimization in an MFIS HZO based Ferroelectric Tunnel Junction for Neuromorphic based Synaptic Storage
Research output: Contribution to journal › Conference article › Contributed › peer-review
Contributors
Abstract
The stack structure tuning of the ferroelectric tunnel junction (FTJ) devices is reported based on the ferroelectric (FE) layer thickness and interface layer (IL) type/thickness optimization to maximize the FTJ Ion/Ioffratio. A FE thickness scaling shows a low voltage FTJ operation, further challenged by a diminishing trend in the maximum Ion/Ioffratio due to the thickness dependence of the FE polarization, independent of the IL thickness. The maximum Ion/Ioffratio varies by tuning the IL type (SiO2, Al2O3) and thickness (1 nm, 2 nm), indicating a maximum at the SiO2(1 nm) IL condition. A stable endurance of 104cycles is limited by the high field/cycles induced IL degradation, a stable FTJ at 10y extrapolated retention time is shown. The FTJ synaptic device operation is reported with insight on the stack structure tunmg impact on the synaptic LTP/LTD nonlmeanty and maximum dynamic range.
Details
Original language | English |
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Pages (from-to) | 1 |
Journal | 2021 Silicon Nanoelectronics Workshop, SNW 2021 |
Publication status | Published - 2021 |
Peer-reviewed | Yes |
Conference
Title | 26th Silicon Nanoelectronics Workshop, SNW 2021 |
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Duration | 13 June 2021 |
City | Virtual, Online |
Country | Japan |
External IDs
ORCID | /0000-0002-2484-4158/work/142257568 |
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Keywords
ASJC Scopus subject areas
Keywords
- Ferroelectnc, FTJ, HZO, MFIS, Synaptic device