High-Frequency Resonator Using A1 Lamb Wave Mode in LiTaO3 Plate
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Acoustic wave devices utilizing plate waves in thin lithium tantalate (LiTaO3) have the potential of achieving high resonance frequency with a suitable electromechanical coupling factor and a relatively small temperature coefficient of frequency (TCF). The influence of Euler angle and plate thickness on the characteristics of plate waves has been investigated. High-frequency resonators using first antisymmetric Lamb wave mode (A1) in (0°, 42°, 0°) LiTaO3 thin plates have been fabricated and optimized. The resonance frequency is as high as 5 GHz, with a relative bandwidth of 7.3% and an impedance ratio of 72 dB. Finally, the TCF of (0°, 42°, 0°) LiTaO3 has been evaluated. Therefore, it is proved that A1 Lamb wave mode propagating in LiTaO3 at a Euler angle close to (0°, 42°, 0°) is suitable for high-frequency devices.
Details
Original language | English |
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Article number | 8737999 |
Pages (from-to) | 1529-1535 |
Number of pages | 7 |
Journal | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
Volume | 66 |
Issue number | 9 |
Publication status | Published - Sept 2019 |
Peer-reviewed | Yes |
Externally published | Yes |
External IDs
PubMed | 31217103 |
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ORCID | /0000-0002-8929-2526/work/150883849 |
Keywords
ASJC Scopus subject areas
Keywords
- High frequency, Lamb waves, LiTaO3, resonator, temperature coefficient of frequency (TCF)