High-Frequency Resonator Using A1 Lamb Wave Mode in LiTaO3 Plate

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Najoua Assila - , Tohoku University (Autor:in)
  • Michio Kadota - , Tohoku University (Autor:in)
  • Shuji Tanaka - , Tohoku University (Autor:in)

Abstract

Acoustic wave devices utilizing plate waves in thin lithium tantalate (LiTaO3) have the potential of achieving high resonance frequency with a suitable electromechanical coupling factor and a relatively small temperature coefficient of frequency (TCF). The influence of Euler angle and plate thickness on the characteristics of plate waves has been investigated. High-frequency resonators using first antisymmetric Lamb wave mode (A1) in (0°, 42°, 0°) LiTaO3 thin plates have been fabricated and optimized. The resonance frequency is as high as 5 GHz, with a relative bandwidth of 7.3% and an impedance ratio of 72 dB. Finally, the TCF of (0°, 42°, 0°) LiTaO3 has been evaluated. Therefore, it is proved that A1 Lamb wave mode propagating in LiTaO3 at a Euler angle close to (0°, 42°, 0°) is suitable for high-frequency devices.

Details

OriginalspracheEnglisch
Aufsatznummer8737999
Seiten (von - bis)1529-1535
Seitenumfang7
FachzeitschriftIEEE transactions on ultrasonics, ferroelectrics, and frequency control
Jahrgang66
Ausgabenummer9
PublikationsstatusVeröffentlicht - Sept. 2019
Peer-Review-StatusJa
Extern publiziertJa

Externe IDs

PubMed 31217103
ORCID /0000-0002-8929-2526/work/150883849

Schlagworte

Schlagwörter

  • High frequency, Lamb waves, LiTaO3, resonator, temperature coefficient of frequency (TCF)