High-Frequency Resonator Using A1 Lamb Wave Mode in LiTaO3 Plate
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Acoustic wave devices utilizing plate waves in thin lithium tantalate (LiTaO3) have the potential of achieving high resonance frequency with a suitable electromechanical coupling factor and a relatively small temperature coefficient of frequency (TCF). The influence of Euler angle and plate thickness on the characteristics of plate waves has been investigated. High-frequency resonators using first antisymmetric Lamb wave mode (A1) in (0°, 42°, 0°) LiTaO3 thin plates have been fabricated and optimized. The resonance frequency is as high as 5 GHz, with a relative bandwidth of 7.3% and an impedance ratio of 72 dB. Finally, the TCF of (0°, 42°, 0°) LiTaO3 has been evaluated. Therefore, it is proved that A1 Lamb wave mode propagating in LiTaO3 at a Euler angle close to (0°, 42°, 0°) is suitable for high-frequency devices.
Details
Originalsprache | Englisch |
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Aufsatznummer | 8737999 |
Seiten (von - bis) | 1529-1535 |
Seitenumfang | 7 |
Fachzeitschrift | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
Jahrgang | 66 |
Ausgabenummer | 9 |
Publikationsstatus | Veröffentlicht - Sept. 2019 |
Peer-Review-Status | Ja |
Extern publiziert | Ja |
Externe IDs
PubMed | 31217103 |
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ORCID | /0000-0002-8929-2526/work/150883849 |
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- High frequency, Lamb waves, LiTaO3, resonator, temperature coefficient of frequency (TCF)