High sensitivity magnetoelastic surface acoustic wave (SAW) magnetic field sensors
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Typical demands for magnetic field sensor applications are high dynamic magnetic field ranges, ambient temperature operation, small dimensions, necessary for high spatial resolution, and low energy consumption. In the case of sensors for biomagnetic sensing very high requirements in case of sensitivity and limit of detection (LOD) in the pT/Hz1/2 to fT/Hz1/2 range arise. Surface acoustic wave (SAW) sensors based on the delta E effect combine the advantages of small form factor, ambient temperature operation and high sensitivity. The SAW sensor consists of a piezoelectric quartz substrate, a silicon oxide layer and a magnetoelastic (Fe90Co10)78Si12B10 layer, deposited on top of the oxide layer. Between interdigital transducers (IDTs) at the ports of the sensor, horizontal shear (Love) waves propagate. The oxide layer serves as a guiding layer. If an external magnetic field is applied, the magnetization alterations in the FeCoSiB layer are accompanied by changes of the shear modulus G and the wave propagation changes. The phase change of a transmitted signal serves as a measure of a magnetic field. Very low phase noise read out electronics is required to detect the phase changes. Heterodyne and homodyne electronic read out circuits are equivalent in performance while homodyne systems are advantages in terms of monolithic integration. The presented SAW sensors reach a high sensitivity with an LOD of 152 pT/Hz1/2 at 10 Hz and 52 pT/Hz1/2 at 100 Hz.
Details
| Original language | English |
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| Title of host publication | Spintronics XV |
| Editors | Henri-Jean M. Drouhin, Jean-Eric Wegrowe, Manijeh Razeghi |
| Publisher | SPIE - The international society for optics and photonics |
| ISBN (electronic) | 9781510653955 |
| ISBN (print) | 9781510653948 |
| Publication status | Published - 2022 |
| Peer-reviewed | Yes |
| Externally published | Yes |
Publication series
| Series | Proceedings of SPIE - The International Society for Optical Engineering |
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| Volume | 12205 |
| ISSN | 0277-786X |
Conference
| Title | Spintronics XV |
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| Conference number | 15 |
| Duration | 21 - 25 August 2022 |
| Location | San Diego Convention Center |
| City | San Diego |
| Country | United States of America |
External IDs
| ORCID | /0000-0001-8012-6794/work/186621459 |
|---|
Keywords
Sustainable Development Goals
ASJC Scopus subject areas
Keywords
- Magnetic field sensors, magnetoelastic surface acoustic wave