High sensitivity magnetoelastic surface acoustic wave (SAW) magnetic field sensors

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Henrik Wolframm - , Christian-Albrechts-Universität zu Kiel (CAU) (Autor:in)
  • Viktor Schell - , Christian-Albrechts-Universität zu Kiel (CAU) (Autor:in)
  • Eckhard Quandt - , Christian-Albrechts-Universität zu Kiel (CAU) (Autor:in)
  • Michael Höft - , Christian-Albrechts-Universität zu Kiel (CAU) (Autor:in)
  • Andreas Bahr - , Christian-Albrechts-Universität zu Kiel (CAU) (Autor:in)

Abstract

Typical demands for magnetic field sensor applications are high dynamic magnetic field ranges, ambient temperature operation, small dimensions, necessary for high spatial resolution, and low energy consumption. In the case of sensors for biomagnetic sensing very high requirements in case of sensitivity and limit of detection (LOD) in the pT/Hz1/2 to fT/Hz1/2 range arise. Surface acoustic wave (SAW) sensors based on the delta E effect combine the advantages of small form factor, ambient temperature operation and high sensitivity. The SAW sensor consists of a piezoelectric quartz substrate, a silicon oxide layer and a magnetoelastic (Fe90Co10)78Si12B10 layer, deposited on top of the oxide layer. Between interdigital transducers (IDTs) at the ports of the sensor, horizontal shear (Love) waves propagate. The oxide layer serves as a guiding layer. If an external magnetic field is applied, the magnetization alterations in the FeCoSiB layer are accompanied by changes of the shear modulus G and the wave propagation changes. The phase change of a transmitted signal serves as a measure of a magnetic field. Very low phase noise read out electronics is required to detect the phase changes. Heterodyne and homodyne electronic read out circuits are equivalent in performance while homodyne systems are advantages in terms of monolithic integration. The presented SAW sensors reach a high sensitivity with an LOD of 152 pT/Hz1/2 at 10 Hz and 52 pT/Hz1/2 at 100 Hz.

Details

OriginalspracheEnglisch
TitelSpintronics XV
Redakteure/-innenHenri-Jean M. Drouhin, Jean-Eric Wegrowe, Manijeh Razeghi
Herausgeber (Verlag)SPIE - The international society for optics and photonics
ISBN (elektronisch)9781510653955
ISBN (Print)9781510653948
PublikationsstatusVeröffentlicht - 2022
Peer-Review-StatusJa
Extern publiziertJa

Publikationsreihe

ReiheProceedings of SPIE - The International Society for Optical Engineering
Band12205
ISSN0277-786X

Konferenz

TitelSpintronics XV
Veranstaltungsnummer15
Dauer21 - 25 August 2022
OrtSan Diego Convention Center
StadtSan Diego
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0001-8012-6794/work/186621459

Schlagworte