High Q-factor Ba0. 25Sr0. 75TiO3 thin film bulk acoustic wave resonators: growth conditions and correlations with microstructure

Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed

Contributors

  • Andrei Vorobiev - (Author)
  • Spartak Gevorgian - (Author)
  • Markus Löffler - , Chalmers University of Technology (Author)
  • Eva Olsson - (Author)

Details

Original languageEnglish
Title of host publicationInternational Symposium on Integrated Functionalities, July 31-August 4, 2011, Cambridge, England
Publication statusPublished - 2011
Peer-reviewedNo
Externally publishedYes