Hexacarbonyl (trimethylsilyl ethyne) dicobalt as MOCVD precursor for thin cobalt layer formation

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Colin Georgi - (Author)
  • A. Hildebrandt - , Chemnitz University of Technology (Author)
  • A. Tuchscherer - (Author)
  • Steffen Oswald - (Author)
  • Heinrich Lang - (Author)

Details

Original languageEnglish
JournalZeitschrift fur Anorganische und Allgemeine Chemie
Publication statusPublished - 2013
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 84887282122

Keywords