Heterointegration technologies for high frequency modules based on film substrates

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Karlheinz Bock - , Chair of Electronic Packaging Technology, Technical University of Berlin, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Erwin Yacoub-George - , Technical University of Berlin, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Henry Wolf - , Technical University of Berlin, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Christof Landesberger - , Technical University of Berlin, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Gerhard Klink - , Technical University of Berlin, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Horst Gieser - , Technical University of Berlin, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)

Abstract

System integration technology requires multifunctionality and in many cases energy autarkic systems, very cost-efficient or open form factor solutions. Integration in plastic or foil substrates by a flex-to-flex integration concept shows the potentially free form factor which allows placing of film based systems on curved surfaces or in housings of very low thickness. Such technologies are not limited to flexible applications. They are available for optimized rigid modules and improve the heat sink by thinning and foil handling of transceiver chips or power devices. Thin semiconductor technologies are not limited to silicon, enabling also heterointegration with compound semiconductors. Meanwhile it is possible to integrate high frequency interconnects and printed passives in plastic foil and thin silicon interposer. Possible application scenarios are large area electronics in ceilings panels of cars or mobile communication systems for the "internet of things and humans".

Details

Original languageEnglish
Title of host publication2013 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013
PublisherCS MANTECH
Pages319-322
Number of pages4
ISBN (print)1893580210, 9781893580213
Publication statusPublished - 2013
Peer-reviewedYes

Publication series

Series2013 International Conference on Compound Semiconductor Manufacturing Technology

Conference

Title28th International Conference on Compound Semiconductor Manufacturing Technology
Abbreviated titleCS MANTECH 2013
Duration13 - 16 May 2013
Website
CityNew Orleans, LA
CountryUnited States of America

External IDs

ORCID /0000-0002-0757-3325/work/139064812

Keywords

Keywords

  • 3D integration, Fine-line metal interconnect, Heterointegration in film substrates, Interposer, Lamination of foils, Multi-layer foil assembly, Rf microstripline in film substrates, Thin semiconductor, Through silicon via TSV