From Sensor Data to Knowledge: Advanced Monitoring and Analysis for Next-Gen Fully Automated Fabs

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed

Abstract

Automated material handling systems (AMHS) are essential for industrial semiconductor production in modern front-end facilities. The control of these systems has a significant impact on ensuring a reliable supply of production resources. Allocating transportation tasks to vehicles in real time is of great importance here, as it represents a computational challenge and has a major impact on the performance of the transportation system (see Wu et al., 2019). Achieving the best possible operation is the subject of numerous research activities (see De Ryck et al., 2020).

Machine learning approaches enable new ways of developing control strategies to achieve higher system performance (see Bai et al., 2023). Our paper provides two examples of how machine learning can be applied to improve task assignment for empty vehicles.

Details

Original languageEnglish
Title of host publication24th European Advanced Process Control and Manufacturing Conference (apc|m)
Pages1-8
Number of pages8
Publication statusPublished - 2026
Peer-reviewedNo

Conference

Title24th European Advanced Process Control and Manufacturing Conference
Abbreviated titleapc|m 2026
Conference number24
Duration28 April 2025 - 30 April 2026
Website
Degree of recognitionInternational event
LocationFour Points by Sheraton Catania Hotel & Conference Center
CityCatania, Sicily
CountryItaly

External IDs

ORCID /0000-0002-1484-7187/work/220700682