From Sensor Data to Knowledge: Advanced Monitoring and Analysis for Next-Gen Fully Automated Fabs

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragen

Abstract

Automated material handling systems (AMHS) are essential for industrial semiconductor production in modern front-end facilities. The control of these systems has a significant impact on ensuring a reliable supply of production resources. Allocating transportation tasks to vehicles in real time is of great importance here, as it represents a computational challenge and has a major impact on the performance of the transportation system (see Wu et al., 2019). Achieving the best possible operation is the subject of numerous research activities (see De Ryck et al., 2020).

Machine learning approaches enable new ways of developing control strategies to achieve higher system performance (see Bai et al., 2023). Our paper provides two examples of how machine learning can be applied to improve task assignment for empty vehicles.

Details

OriginalspracheEnglisch
Titel24th European Advanced Process Control and Manufacturing Conference (apc|m)
Seiten1-8
Seitenumfang8
PublikationsstatusVeröffentlicht - 2026
Peer-Review-StatusNein

Konferenz

Titel24th European Advanced Process Control and Manufacturing Conference
Kurztitelapc|m 2026
Veranstaltungsnummer24
Dauer28 April 2025 - 30 April 2026
Webseite
BekanntheitsgradInternationale Veranstaltung
OrtFour Points by Sheraton Catania Hotel & Conference Center
StadtCatania, Sicily
LandItalien

Externe IDs

ORCID /0000-0002-1484-7187/work/220700682