From Doping to Dilution: Local Chemistry and Collective Interactions of La in HfO 2

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Thomas Szyjka - (Author)
  • Lutz Baumgarten - (Author)
  • Oliver Rehm - (Author)
  • Claudia Richter - (Author)
  • Yury Matveyev - (Author)
  • Christoph Schlueter - (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics (Author)
  • Uwe Schroeder - (Author)
  • Martina Müller - (Author)

Abstract

Lanthanum (La) doping is considered as a promising route to overcome reliability issues of switchable ferroelectric HfO 2-based devices. This study links the local chemistry at the La lattice sites with local and collective electronic properties of the La:HfO 2 matrix using hard X-ray photoelectron spectroscopy. The satellite structure of the La 3d core level, the plasmonic excitation energies, and core-level rigid binding energy shifts are investigated for La:HfO 2 samples with a wide range of La doping, ranging from 3.5% to 33%, i.e., from the doping to dilution level. The emerging chemical phases and electronic properties are discussed as a function of La content. From the evolution of the plasmon excitation energies and rigid binding energy shifts, it is concluded that electronic charge compensation by oxygen vacancies occurs for increasing La content.

Details

Original languageEnglish
Article number2100582
JournalPhysica status solidi / Rapid research letters
Volume16
Issue number10
Publication statusPublished - 3 Feb 2022
Peer-reviewedYes

External IDs

Scopus 85124825437
unpaywall 10.1002/pssr.202100582
WOS 000758916800001
Mendeley 11ad8962-921c-3494-a10a-0c8b196359f2

Keywords

DFG Classification of Subject Areas according to Review Boards

Keywords

  • 3d multiplet, La:HfO, doping limit, hard X-ray photoelectron spectroscopy, vacancies, HfO2, La, La:HfO2

Library keywords