Ferroelectric Polarization Enabled Threshold Voltage Modulation in High Electron Mobility Transistor

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Wentian Gao - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Andre Wachowiak - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Roberto Guido - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)

Abstract

Integrating ferroelectric thin films into the gate stack of high electron mobility transistors (HEMTs) would enable modulation of the threshold voltage (Vth) and, ultimately, switching between depletion (D)- and enhancement (E)-mode within the same HEMT. However, the experimental range over which Vth can be modulated is often substantially smaller than that expected from the coercive voltage. A comprehensive model for complete control over the interplay between ferroelectric switching and HEMT operation is presented, considering a versatile ferroelectric-metal-HEMT (FeMHEMT) configuration. The proposed model delivers quantitative predictions of achievable Vth values in relation to the ferroelectric polarization orientation, which are verified through a modular approach of connecting ferroelectric capacitors to metal-insulator-semiconductor (MIS) HEMTs. Essential guidelines for integrating wurtzite- and fluorite-structured ferroelectrics with HEMTs at their full potential are presented. The area ratio between the ferroelectric and MIS capacitors is identified as a crucial parameter for achieving complete polarization reversal without MIS breakdown, especially for wurtzite-structured ferroelectrics. Comparing hafnium zirconium oxide and aluminium scandium nitride, the role played by the charge injected into the floating gate on the FeMHEMT operation is elucidated. A remarkably large memory window of 37.6 V is experimentally demonstrated while switching between D- and E-mode within the same FeMHEMT.

Details

Original languageEnglish
Article numbere77470
JournalAdvanced functional materials
Volume36
Issue number73
Publication statusPublished - 10 Sept 2026
Peer-reviewedYes

Keywords

Keywords

  • aluminum scandium nitride, ferroelectrics, gallium nitride, hafnium zirconium oxide, high electron mobility transistor