Fast Fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Details
| Original language | English |
|---|---|
| Article number | 213106 |
| Journal | Applied physics letters |
| Volume | 117 |
| Issue number | 21 |
| Publication status | Published - 2020 |
| Peer-reviewed | Yes |
External IDs
| WOS | 000595729100002 |
|---|---|
| Scopus | 85096927456 |