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Fab Simulation and Virtualization - The Key to Enhance the Fab Performance within the Semiconductor Industry

Research output: Contribution to conferences › Paper › Contributed

Contributors

Germar Schneider - (Author)
Thomas Wagner - (Author)
Jens Naake - (Author)
Sebastian Rank - , Chair of Material Handling (Author)
Frank Schulze - , Chair of Material Handling (Author)

Details

Original language	English
Publication status	Published - 2018
Peer-reviewed	No

External IDs

ORCID	/0000-0002-6691-5030/work/142247129

Keywords

Keywords

Semiconductor, AMHS, Simulation, Digitalization, Fab Simulation, Semiconductor industry