Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
In this study, the influence of the emitter efficiency on the forward current–voltage characteristics, especially the conductivity modulation of bipolar SiC-diodes was analyzed. It was determined that the emitter efficiency of p-emitters formed by ion implantation is significantly lower compared to p-emitters formed by epitaxy. In contrast to comparable studies, experimental approach was arranged that the influence of the quality of the drift-layer or the thickness of the emitter on the conductivity modulation could be excluded for the fabricated bipolar SiC-diodes of this work. Thus, it can be established that the lower emitter injection efficiency is mainly caused by the reduced electron lifetime in p-emitters formed by ion implantation. Therefore, a significant enhancement of the electron lifetime in implanted p-emitters is mandatory for e.g. SiC-MPS-diodes where the functionality of the devices depends significantly on the injection efficiency.
Details
| Original language | German |
|---|---|
| Pages (from-to) | 101-105 |
| Number of pages | 5 |
| Journal | Solid-state electronics |
| Volume | 144 |
| Publication status | Published - 2018 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 85045185308 |
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Keywords
Keywords
- Carrier lifetime, Emitter efficiency, Ion implantation, MPS-diode, P-i-n diode, Silicon carbide