Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
In this study, the influence of the emitter efficiency on the forward current–voltage characteristics, especially the conductivity modulation of bipolar SiC-diodes was analyzed. It was determined that the emitter efficiency of p-emitters formed by ion implantation is significantly lower compared to p-emitters formed by epitaxy. In contrast to comparable studies, experimental approach was arranged that the influence of the quality of the drift-layer or the thickness of the emitter on the conductivity modulation could be excluded for the fabricated bipolar SiC-diodes of this work. Thus, it can be established that the lower emitter injection efficiency is mainly caused by the reduced electron lifetime in p-emitters formed by ion implantation. Therefore, a significant enhancement of the electron lifetime in implanted p-emitters is mandatory for e.g. SiC-MPS-diodes where the functionality of the devices depends significantly on the injection efficiency.
Details
| Originalsprache | Deutsch |
|---|---|
| Seiten (von - bis) | 101-105 |
| Seitenumfang | 5 |
| Fachzeitschrift | Solid-state electronics |
| Jahrgang | 144 |
| Publikationsstatus | Veröffentlicht - 2018 |
| Peer-Review-Status | Ja |
Externe IDs
| Scopus | 85045185308 |
|---|
Schlagworte
Schlagwörter
- Carrier lifetime, Emitter efficiency, Ion implantation, MPS-diode, P-i-n diode, Silicon carbide