Evaluation of the thermal stability of a low-coherence interferometer for precision surface profilometry.
Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review
Contributors
Details
Original language | English |
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Title of host publication | Proceedings of SPIE |
Volume | 10110 |
Publication status | Published - 2017 |
Peer-reviewed | Yes |
External IDs
ORCID | /0000-0003-0554-2178/work/148606933 |
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