Environment-friendly photolithography using poly(N-isopropylacrylamide)- based thermoresponsive photoresists

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Leonid Ionov - , Max Planck Institute of Molecular Cell Biology and Genetics, Leibniz Institute of Polymer Research Dresden (Author)
  • Stefan Diez - , Max Planck Institute of Molecular Cell Biology and Genetics (Author)

Abstract

We report a novel approach for the temperature-triggered development of water-soluble photoresists based on photocleavable poly(N-isopropylacrylamide) copolymers. These copolymers are soluble in an aqueous environment below their Lower Critical Solution Temperature (LCST). Upon UV irradiation, the photocleavable groups are deprotected resulting in an increased LCST. Thus, the illuminated parts of spin-coated copolymer layers dissolve at higher temperatures than the surrounding areas, leading to pattern development. The photoresist can finally be completely removed at low temperature. We demonstrate the applicability of this novel photolithographic approach by the patterning of fluorescent proteins.

Details

Original languageEnglish
Pages (from-to)13315-13319
Number of pages5
JournalJournal of the American Chemical Society
Volume131
Issue number37
Publication statusPublished - 23 Sept 2009
Peer-reviewedYes
Externally publishedYes

External IDs

PubMed 19711979
ORCID /0000-0002-0750-8515/work/142235576