Environment-friendly photolithography using poly(N-isopropylacrylamide)- based thermoresponsive photoresists

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Leonid Ionov - , Max Planck Institute of Molecular Cell Biology and Genetics, Leibniz-Institut für Polymerforschung Dresden (Autor:in)
  • Stefan Diez - , Max Planck Institute of Molecular Cell Biology and Genetics (Autor:in)

Abstract

We report a novel approach for the temperature-triggered development of water-soluble photoresists based on photocleavable poly(N-isopropylacrylamide) copolymers. These copolymers are soluble in an aqueous environment below their Lower Critical Solution Temperature (LCST). Upon UV irradiation, the photocleavable groups are deprotected resulting in an increased LCST. Thus, the illuminated parts of spin-coated copolymer layers dissolve at higher temperatures than the surrounding areas, leading to pattern development. The photoresist can finally be completely removed at low temperature. We demonstrate the applicability of this novel photolithographic approach by the patterning of fluorescent proteins.

Details

OriginalspracheEnglisch
Seiten (von - bis)13315-13319
Seitenumfang5
FachzeitschriftJournal of the American Chemical Society
Jahrgang131
Ausgabenummer37
PublikationsstatusVeröffentlicht - 23 Sept. 2009
Peer-Review-StatusJa
Extern publiziertJa

Externe IDs

PubMed 19711979
ORCID /0000-0002-0750-8515/work/142235576