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Electrically tunable, optical microcavity based on metallized and ultra-soft PDMS gel

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

M. Franke - , Chair of Electrical Power Supply (Author)
I. Slowik - , Chair of Opto-Electronics, Chair of Materials Science and Nanotechnology (Author)
G. Paschew - , Chair of Microsystems, Institute of Semiconductors and Microsystems (Author)
U. Merkel - , Chair of Semiconductors (Author)
H. Froeb - , Chair of Opto-Electronics (Author)
K. Leo - , Chair of Opto-Electronics (Author)
A. Richter - , Chair of Microsystems (Author)

Details

Original language	English
Article number	979832
Journal	Proceedings of SPIE
Volume	9798
Publication status	Published - 2016
Peer-reviewed	Yes

External IDs

Scopus	84989271321
ORCID	/0000-0002-8588-9755/work/142246720

Keywords

Keywords

(Electrically tunable) microcavity, dielectric elastomer actuator, oxygen plasma treatment, polymer surface metallization, PDMS gel

Library keywords

530 Physics
621 Applied physics