Ein Prozess-Integrierendes Clustertool für 2D-Materialsysteme: vom Einzelprozess zur Integration auf Waferlevel
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
2D materials are an upcoming class of materials for micro- and nanoelectronics due to their outstanding mechanical, optical, and electronic properties. They have attracted incredible interest both in the scientific and engineering communities. A reliable 2D technology in an industrial scale is yet to be demonstrated due to lack of suitable precursor chemistries, insufficient control of precise large-area monolayer growth, patterning processes or interface control up to now. The customer specific cluster tool presented here in together with an interdisciplinary research team offers a perspective to master these challenges and act as a bridgehead between science, university training and industry.
Translated title of the contribution | A process-integrating cluster tool for 2D materials from single process to wafer level integration |
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Details
Original language | German |
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Title of host publication | MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings |
Publisher | VDE Verlag, Berlin [u. a.] |
Pages | 502-505 |
Number of pages | 4 |
ISBN (electronic) | 9783800756575 |
Publication status | Published - 2021 |
Peer-reviewed | Yes |
Externally published | Yes |
Publication series
Series | 2021 MikroSystemTechnik Kongress (MEMS-MOEMS) |
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Conference
Title | MikroSystemTechnik Congress 2021 |
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Subtitle | Microelectronics, Microsystems Engineering and their Applications - Innovative Products for Future-Oriented Markets |
Abbreviated title | MST 2021 |
Duration | 8 - 10 November 2021 |
Website | |
City | Stuttgart-Ludwigsburg |
Country | Germany |
External IDs
Mendeley | 52c2df9b-7f24-35a8-9c6c-7264f87cd465 |
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