Ein Prozess-Integrierendes Clustertool für 2D-Materialsysteme: vom Einzelprozess zur Integration auf Waferlevel
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
2D materials are an upcoming class of materials for micro- and nanoelectronics due to their outstanding mechanical, optical, and electronic properties. They have attracted incredible interest both in the scientific and engineering communities. A reliable 2D technology in an industrial scale is yet to be demonstrated due to lack of suitable precursor chemistries, insufficient control of precise large-area monolayer growth, patterning processes or interface control up to now. The customer specific cluster tool presented here in together with an interdisciplinary research team offers a perspective to master these challenges and act as a bridgehead between science, university training and industry.
| Translated title of the contribution | A process-integrating cluster tool for 2D materials from single process to wafer level integration |
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Details
| Original language | German |
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| Title of host publication | MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings |
| Publisher | VDE Verlag, Berlin [u. a.] |
| Pages | 502-505 |
| Number of pages | 4 |
| ISBN (electronic) | 9783800756575 |
| Publication status | Published - 2021 |
| Peer-reviewed | Yes |
| Externally published | Yes |
Publication series
| Series | 2021 MikroSystemTechnik Kongress (MEMS-MOEMS) |
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Conference
| Title | MikroSystemTechnik Congress 2021 |
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| Subtitle | Microelectronics, Microsystems Engineering and their Applications - Innovative Products for Future-Oriented Markets |
| Abbreviated title | MST 2021 |
| Duration | 8 - 10 November 2021 |
| Website | |
| City | Stuttgart-Ludwigsburg |
| Country | Germany |
External IDs
| Mendeley | 52c2df9b-7f24-35a8-9c6c-7264f87cd465 |
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