Ein Prozess-Integrierendes Clustertool für 2D-Materialsysteme: vom Einzelprozess zur Integration auf Waferlevel

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • M. Hoffmann - , Ruhr University Bochum (Author)
  • P. Awakowicz - , Ruhr University Bochum (Author)
  • A. Devi - , Ruhr University Bochum (Author)
  • J. Schulze - , Ruhr University Bochum (Author)
  • B. Freyer - , SENTECH Instruments GmbH (Author)
  • F. P. Witek - , SENTECH Instruments GmbH (Author)
  • C. Bock - , Ruhr University Bochum (Author)

Abstract

2D materials are an upcoming class of materials for micro- and nanoelectronics due to their outstanding mechanical, optical, and electronic properties. They have attracted incredible interest both in the scientific and engineering communities. A reliable 2D technology in an industrial scale is yet to be demonstrated due to lack of suitable precursor chemistries, insufficient control of precise large-area monolayer growth, patterning processes or interface control up to now. The customer specific cluster tool presented here in together with an interdisciplinary research team offers a perspective to master these challenges and act as a bridgehead between science, university training and industry.

Translated title of the contribution
A process-integrating cluster tool for 2D materials
from single process to wafer level integration

Details

Original languageGerman
Title of host publicationMikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings
PublisherVDE Verlag, Berlin [u. a.]
Pages502-505
Number of pages4
ISBN (electronic)9783800756575
Publication statusPublished - 2021
Peer-reviewedYes
Externally publishedYes

Publication series

Series2021 MikroSystemTechnik Kongress (MEMS-MOEMS)

Conference

TitleMikroSystemTechnik Congress 2021
SubtitleMicroelectronics, Microsystems Engineering and their Applications - Innovative Products for Future-Oriented Markets
Abbreviated titleMST 2021
Duration8 - 10 November 2021
Website
CityStuttgart-Ludwigsburg
CountryGermany

External IDs

Mendeley 52c2df9b-7f24-35a8-9c6c-7264f87cd465