Ein neuer Prozess für die Herstellung von Silberdünnschichten mittels Atomlagenabscheidung
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Translated title of the contribution | A new process for the production of silver thin films by means of atomic layer deposition |
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Details
Original language | German |
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Title of host publication | MikroSystemTechnik Kongress 2019 - Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings |
Publisher | VDE Verlag, Berlin [u. a.] |
Pages | 48-51 |
Number of pages | 4 |
ISBN (electronic) | 9783800751297 |
Publication status | Published - 2019 |
Peer-reviewed | Yes |
Externally published | Yes |
Publication series
Series | 2019 MikroSystemTechnik Kongress (MEMS-MOEMS) |
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Conference
Title | MikroSystemTechnik Congress 2019: Microelectronics, MEMS-MOEMS, System Integration - Pillars of Digitization and Artificial Intelligence |
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Duration | 28 - 30 October 2019 |
City | Berlin |
Country | Germany |