Ein neuer Prozess für die Herstellung von Silberdünnschichten mittels Atomlagenabscheidung

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Nils Boysen - , Ruhr University Bochum (Author)
  • Tim Hasselmann - , University of Wuppertal (Author)
  • Thomas Riedl - , University of Wuppertal (Author)
  • Anjana Devi - , Ruhr University Bochum (Author)
Translated title of the contribution
A new process for the production of silver thin films by means of atomic layer deposition

Details

Original languageGerman
Title of host publicationMikroSystemTechnik Kongress 2019 - Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings
PublisherVDE Verlag, Berlin [u. a.]
Pages48-51
Number of pages4
ISBN (electronic)9783800751297
Publication statusPublished - 2019
Peer-reviewedYes
Externally publishedYes

Publication series

Series2019 MikroSystemTechnik Kongress (MEMS-MOEMS)

Conference

TitleMikroSystemTechnik Congress 2019: Microelectronics, MEMS-MOEMS, System Integration - Pillars of Digitization and Artificial Intelligence
Duration28 - 30 October 2019
CityBerlin
CountryGermany