Dual-frequency plasma surface modification of polyimide thin films

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review

Contributors

Gunnar Suchaneck - , Chair of Solid State Electronics (Author)
Margarita Günther - , Chair of Solid State Electronics (Author)
Barbara Adolphi - , Chair of Microsystems Technology (Author)
Gerald Gerlach - , Chair of Solid State Electronics (Author)
Karin Sahre - , Leibniz Institute of Polymer Research Dresden (Author)
Klaus-Jochen Eichhorn - , Leibniz Institute of Polymer Research Dresden (Author)
Alexandr G. Deineka - , Czech Academy of Sciences (Author)
Lubomir Jastrabik - , Czech Academy of Sciences (Author)

Original language	English
Title of host publication	Proceedings of ISPC 15, Orleans, July 9-13, 2001
Pages	2485-2490
Number of pages	6
Publication status	Published - 13 Jul 2001
Peer-reviewed	Yes

ORCID	/0000-0002-7062-9598/work/222761382