Co-sputtering yttrium into hafnium oxide thin films to produce ferroelectric properties

Research output: Contribution to journalResearch articleContributedpeer-review

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Details

Original languageEnglish
Article number082905
JournalApplied physics letters
Volume101
Issue number8
Publication statusPublished - 2012
Peer-reviewedYes

External IDs

Scopus 84865526703

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