Correlations between microstructure and Q-factor of tunable thin film bulk acoustic wave resonators

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Andrei Vorobiev - (Author)
  • Spartak Gevorgian - (Author)
  • Markus Löffler - , Chalmers University of Technology (Author)
  • Eva Olsson - (Author)

Details

Original languageEnglish
Pages (from-to)054102
Number of pages1
JournalJournal of applied physics
Volume110
Issue number5
Publication statusPublished - 2011
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 80052950361

Keywords