Cold split kerf-free wafering results for doped 4H-SiC boules

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Marko Swoboda - , Siltectra GmbH (Author)
  • R. Rieske - , Siltectra GmbH (Author)
  • Christian Beyer - , Siltectra GmbH (Author)
  • Albrecht Ullrich - , Siltectra GmbH (Author)
  • G. Gesell - , Siltectra GmbH (Author)
  • Jan Richter - , Siltectra GmbH (Author)

Abstract

We report on the results of intense third party evaluation of the COLD SPLIT technology. In total nine different SiC manufactures supplied test material. The results confirm the tremendous potential of the technology with total kerf losses per wafer of less than 100µm. Furthermore, our general approach led to comparable results for all vendors. The vendor specific difference like lateral doping level were addressed via control loops in our lasering process. These loops take crystal properties into account and adjust the applied laser energy and the depth of the laser process accordingly. Even the current best case results of sub 80µm split loss per wafer are dominated by systematic effects, which are addressed by continuous improvement efforts.

Details

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2018
Pages10-13
Number of pages4
ISBN (electronic)978-3-0357-3332-7
Publication statusPublished - 2019
Peer-reviewedYes
Externally publishedYes

Publication series

SeriesMaterials Science Forum
Volume963
ISSN0255-5476

Conference

Title12th European Conference on Silicon Carbide and Related Materials
Abbreviated titleECSCRM 2018
Conference number12
Duration2 - 6 September 2018
LocationNational Exhibition Centre
CityBirmingham
CountryUnited Kingdom

External IDs

ORCID /0000-0003-2572-1149/work/208796538

Keywords

Keywords

  • Cracks, Crystalline materials, Crystals, Kerf-free wafering techniques, Laser materials processing, Rough surfaces, Silicon carbide, Stress, Substrates, Surface treatment, Wide band gap semiconductors