Cold split kerf-free wafering results for doped 4H-SiC boules
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
We report on the results of intense third party evaluation of the COLD SPLIT technology. In total nine different SiC manufactures supplied test material. The results confirm the tremendous potential of the technology with total kerf losses per wafer of less than 100µm. Furthermore, our general approach led to comparable results for all vendors. The vendor specific difference like lateral doping level were addressed via control loops in our lasering process. These loops take crystal properties into account and adjust the applied laser energy and the depth of the laser process accordingly. Even the current best case results of sub 80µm split loss per wafer are dominated by systematic effects, which are addressed by continuous improvement efforts.
Details
| Original language | English |
|---|---|
| Title of host publication | Silicon Carbide and Related Materials 2018 |
| Pages | 10-13 |
| Number of pages | 4 |
| ISBN (electronic) | 978-3-0357-3332-7 |
| Publication status | Published - 2019 |
| Peer-reviewed | Yes |
| Externally published | Yes |
Publication series
| Series | Materials Science Forum |
|---|---|
| Volume | 963 |
| ISSN | 0255-5476 |
Conference
| Title | 12th European Conference on Silicon Carbide and Related Materials |
|---|---|
| Abbreviated title | ECSCRM 2018 |
| Conference number | 12 |
| Duration | 2 - 6 September 2018 |
| Location | National Exhibition Centre |
| City | Birmingham |
| Country | United Kingdom |
External IDs
| ORCID | /0000-0003-2572-1149/work/208796538 |
|---|
Keywords
ASJC Scopus subject areas
Keywords
- Cracks, Crystalline materials, Crystals, Kerf-free wafering techniques, Laser materials processing, Rough surfaces, Silicon carbide, Stress, Substrates, Surface treatment, Wide band gap semiconductors