Cold split kerf-free wafering results for doped 4H-SiC boules
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
We report on the results of intense third party evaluation of the COLD SPLIT technology. In total nine different SiC manufactures supplied test material. The results confirm the tremendous potential of the technology with total kerf losses per wafer of less than 100µm. Furthermore, our general approach led to comparable results for all vendors. The vendor specific difference like lateral doping level were addressed via control loops in our lasering process. These loops take crystal properties into account and adjust the applied laser energy and the depth of the laser process accordingly. Even the current best case results of sub 80µm split loss per wafer are dominated by systematic effects, which are addressed by continuous improvement efforts.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | Silicon Carbide and Related Materials 2018 |
| Seiten | 10-13 |
| Seitenumfang | 4 |
| ISBN (elektronisch) | 978-3-0357-3332-7 |
| Publikationsstatus | Veröffentlicht - 2019 |
| Peer-Review-Status | Ja |
| Extern publiziert | Ja |
Publikationsreihe
| Reihe | Materials Science Forum |
|---|---|
| Band | 963 |
| ISSN | 0255-5476 |
Konferenz
| Titel | 12th European Conference on Silicon Carbide and Related Materials |
|---|---|
| Kurztitel | ECSCRM 2018 |
| Veranstaltungsnummer | 12 |
| Dauer | 2 - 6 September 2018 |
| Ort | National Exhibition Centre |
| Stadt | Birmingham |
| Land | Großbritannien/Vereinigtes Königreich |
Externe IDs
| ORCID | /0000-0003-2572-1149/work/208796538 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Cracks, Crystalline materials, Crystals, Kerf-free wafering techniques, Laser materials processing, Rough surfaces, Silicon carbide, Stress, Substrates, Surface treatment, Wide band gap semiconductors