Cold split kerf-free wafering results for doped 4H-SiC boules

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Marko Swoboda - , Siltectra GmbH (Autor:in)
  • R. Rieske - , Siltectra GmbH (Autor:in)
  • Christian Beyer - , Siltectra GmbH (Autor:in)
  • Albrecht Ullrich - , Siltectra GmbH (Autor:in)
  • G. Gesell - , Siltectra GmbH (Autor:in)
  • Jan Richter - , Siltectra GmbH (Autor:in)

Abstract

We report on the results of intense third party evaluation of the COLD SPLIT technology. In total nine different SiC manufactures supplied test material. The results confirm the tremendous potential of the technology with total kerf losses per wafer of less than 100µm. Furthermore, our general approach led to comparable results for all vendors. The vendor specific difference like lateral doping level were addressed via control loops in our lasering process. These loops take crystal properties into account and adjust the applied laser energy and the depth of the laser process accordingly. Even the current best case results of sub 80µm split loss per wafer are dominated by systematic effects, which are addressed by continuous improvement efforts.

Details

OriginalspracheEnglisch
TitelSilicon Carbide and Related Materials 2018
Seiten10-13
Seitenumfang4
ISBN (elektronisch)978-3-0357-3332-7
PublikationsstatusVeröffentlicht - 2019
Peer-Review-StatusJa
Extern publiziertJa

Publikationsreihe

ReiheMaterials Science Forum
Band963
ISSN0255-5476

Konferenz

Titel12th European Conference on Silicon Carbide and Related Materials
KurztitelECSCRM 2018
Veranstaltungsnummer12
Dauer2 - 6 September 2018
OrtNational Exhibition Centre
StadtBirmingham
LandGroßbritannien/Vereinigtes Königreich

Externe IDs

ORCID /0000-0003-2572-1149/work/208796538

Schlagworte

Schlagwörter

  • Cracks, Crystalline materials, Crystals, Kerf-free wafering techniques, Laser materials processing, Rough surfaces, Silicon carbide, Stress, Substrates, Surface treatment, Wide band gap semiconductors