Charge trapping and endurance degradation in ferroelectric field-effect transistors

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Dominik Kleimaier - , Global Foundries Dresden (Author)
  • Stefan Dünkel - , Global Foundries Dresden (Author)
  • Halid Mulaosmanovic - , Global Foundries Dresden (Author)
  • Johannes Müller - , Global Foundries Dresden (Author)
  • Sven Beyer - , Global Foundries Dresden (Author)
  • Viktor Havel - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

In this study, various charge trapping mechanisms and their effects on the endurance of n- and p-type HfO2-based FeFETs, integrated within GlobalFoundries 28 nm bulk high-k metal gate (HKMG) technology are examined. The device’s endurance is impaired due to pronounced interface degradation and charge injection into the Metal-Ferroelectric-Insulator-Semiconductor (MFIS) gate stack caused by the high interfacial field stress. By analyzing threshold voltage shifts under both bipolar and unipolar cycling, as well as bipolar endurance cycling for “non-ferroelectric” samples with diminishing remanent polarization levels, the study reveals the critical role of polarization switching in endurance degradation. The findings highlight the deterioration of the gate stack and specifically of the interface of FeFETs upon bipolar cycling which strongly affects the electrical characteristics and causes increased electron trapping in n-type-FeFETs and hole trapping in p-type FeFETs. This effect is particularly pronounced for each device's low threshold-voltage (LVT) state and is intensified by polarization switching. The study's results contribute to a deeper understanding of the charge trapping phenomena in HfO2-based FeFETs and their impact on device performance and reliability.

Details

Original languageEnglish
Title of host publicationNVMTS 2024 - 22nd IEEE Non-Volatile Memory Technology Symposium
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages1-5
ISBN (electronic)979-8-3315-3265-9
Publication statusPublished - 2024
Peer-reviewedYes
Externally publishedYes

Publication series

SeriesNon-Volatile Memory Technology Symposium Proceedings (NVMTS)

Conference

Title22nd IEEE Non-Volatile Memory Technology Symposium
Abbreviated titleNVMTS 2024
Conference number22
Duration20 - 23 October 2024
Website
LocationBusan Paradise Hotel
CityBusan
CountryKorea, Republic of

External IDs

ORCID /0000-0003-3814-0378/work/180371986

Keywords

Keywords

  • charge trapping, endurance, Ferroelectric field-effect transistor (FeFET), ferroelectric memories, hafnium oxide, n-FeFET, p-FeFET